High vacuum system is composed of built - in bipolar rotary vane mechanical vacuum pump, diffusion
pump/molecular pump and resistance gauge which processed by special stabilization. With high accuracy,
good stability and strong anti-interference ability. The display of vacuum degree adopted scientific
notation, digital display and intuitive, easy to use.
High vacuum molecular pump system is composed of preamp oilless pump, molecular sub-pump, vacuum
sensors, electronic control system and Digital LED screen. Adopted preamp pump as the main pump,
mechanical pump as the preamp pump of molecular pump. This system is used to suction or compressed
air and non-corrosive, insoluble in water, does not contain solid particles gas, to the formation of vacuum
and pressure in a closed container, allowed little liquid mixed in the suction gases.
The diffusion pump is one of the most important tools to gain the high vacuum, and widely used. The
diffusion pump is a sub-pump, it requires a mechanical pump as its preamp pump. It proposed of pump
body, cooling cap, nozzle, steam diversion tube heaters and coolers.
Diffusion pump oil in vacuum and heated to boiling temperature (about 200 degrees) to produce large
amounts of oil vapor, oil vapor through the diversion pipe by all grade of nozzle directional high-speed
spray. Near the inlet of the diffusion pump was pumping gas partial pressure is higher than the partial
pressure of the gas in the vapor stream. In this way, the pumping of gas molecules along steam direction of
high-speed movement, the gas molecules encounter the pump wall after reflection back by the vapor
stream collision re along the direction of vapor flow to the pump wall. After a few times after the collision,
the gas molecules are compressed to the low vacuum side, and then by several stages of the nozzle to spray
the steam inlet multi-stage compression, and finally take away the pre-pump, and the provision of oil vapor
in the cooling pump condensing and then return to the lower re-heating, so the cycle of work to achieve
pumping purposes.

Main uses:
To obtain the high vacuum for high temperature vacuum sintering, CVD experiments, vacuum annealing
and material handling.

Technical Parameter:
Model                                 : ZK-K                                                 ZK-F
                                            Approved by CE certificate, ensure the safety operation of the machine.
                                            Certificate No.: GB/1067/4189/12 Issue 1
Vacuum degree                    : 0.1-0.01Pa                                        0.1-0.001Pa
Ultimate vacuum                   : 4.0*10^-4Pa                                       5.0*10^-5Pa
Configuration                       : Double stage rotary vane vacuum          Double stage rotary vane vacuum pump
                                                 pump + Diffusion pump                                + Molecular pump
Measuring mode                   : Compound vacuum gauge                    Compound vacuum gauge
Vacuum gauge tube             : Resistance gauge + ionization gauge     Resistance gauge + ionizati on gauge
Cooling mode                      : Water cooling                                      Air cooling
Power supply                      : AC380V 50/60HZ                                 AC220V 50/60HZ
Pumping speed                   : 100L/S                                                110L/S
Standard                            : Corrugated tube 1 piece, KF flange 1
configuration                           piece, Diffusion pump vacuum system
                                            1 set, hoop 5 pieces, vacuum gauge 1 piece.
                                            Corrugated tube 1 piece, KF flange 1
                                            piece, vacuum system 1 set, hoop 5
                                            pieces, vacuum gauge 1 piece