HQ-Z mixed gas system is controlled by the single-channel or multi-channel mass flowmeter to continuous
supply the mixed gas. And can realize precision measurement and control of the gas mass flow; Each gas
pipes are equipped with high-pressure check valve to ensure the system used safety and reliable; With the
features of uniform mixed gas, high precision control, digital display and intuitive and sensitive features.
The high-precision mass flow control system is composed of multi-channel mass flow meter, flow
indicator, etc. , Achieved the precision measurement and control of gas flow; with high accuracy, fast
response, extremely low zero drift and temperature drift, good compatibility and reliable sealing
performance features. Via software to support the interactive interface and easy operation. Each gas
pipeline are equipped with high - pressure check valve to ensure the system safe and reliable;

Main uses:
For the precision gas flow control of high temperature atmosphere sintering, atmosphere restoring and
CVD/CVI experiments.

Technical Parameter:
Model                             : HQ-Z (Approved by CE certificate, ensure the safety operation of the machine.
                                        Certificate No.: GB/1067/4189/12 Issue 1)
Control mode                   : D07 - 7K mass flowmeter, of D08 flow indicator
Flow                               : 0－500SCCM/0－1SLM (Customized)
Linear                             : ±0.5%F.S.
Accuracy                         : ±1%F.S.
Repeat accuracy               : ±1%F.S.
Respond time                  : ≤2sec
Zero drift                        : ＜0.6%F.S.
Pressure                         : 3MPa
Gas channel                    : Multi-routes (Customized)
Mix gas tank                    : Φ100*300mm
Check valve                    : Φ6mm
Needle valve                   : Stainless steel
Pipeline                          : Φ6mm Stainless steel tube
Interface                        : SwagelokΦ6mm
Moving workbench          : 720*500*850mm